Yiqun Liu
University of Science and Technology of China
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Yiqun Liu is a highly experienced professional with 16.1 years of work experience in thin films, atomic layer deposition, powder x ray diffraction, semiconductors, and CMOS. Based in China, Yiqun has a strong focus on research and development of manufacturable processes for high-quality high-k dielectrics and metal gate thin films for advanced microelectronic technology. He has also played a key role in improving the integration scheme of replacement metal gate module to boost device performance and reliability. Yiqun's specialties include replacement metal gate integration, ALD process development, Thin film analysis using TEM, XRD, and device fabrication.
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About
My major focus has been the research & development of manufacturable processes of high-quality high-κ dielectrics and metal gate thin films for advanced microelectronic technology (gate-last and FinFET). Also, I have worked on improving the integration scheme of replacement metal gate module to boost device performance and reliability. During my Ph.D. Career, I have been working on atomic layer deposition (ALD) of lanthanide-based high-κ material for gate oxide applications in microelectronics.I am also involved in other projects such as Cu interconnections and transparent conductor oxide for flexible devices and solar cell applications. Specialties: Replacement Metal Gate Integration. ALD process development, Thin film analysis using TEM, XRD and etc. Device fabrication
...See MoreWork Experience
Member Of Technical Staff
Appliances, Electrical, and Electronics Manufacturing
Yiqun Liu's Professional Milestones
- Member Of Technical Staff (2015-10-01~): Maximized technical skills and productivity through effective leadership and implementation of effective strategies.
- Teaching Fellow (2007-09-01~2008-05-01): Inspiring students through interactive and engaging teaching techniques that foster a love for learning.
Education
Applied Physics
1009843200-1136073600Skill
Thin Films
Atomic Layer Deposition
Powder X Ray Diffraction
Semiconductors
Cmos
Characterization
Tem
Afm
Process Simulation
Certification
Colleagues
Other Named Yiqun Liu
Frequently asked questions
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Yiqun Liu works for Semiconductor Manufacturing International Corp
Yiqun Liu's role in Semiconductor Manufacturing International Corp is Member Of Technical Staff
Yiqun Liu works in the industry of Appliances, Electrical, and Electronics Manufacturing
Yiqun Liu's colleagues are Hongxiang Mo,BEI Emily,Annie Yang
Yiqun Liu's latest job experience is Member Of Technical Staff at Semiconductor Manufacturing International Corp
Yiqun Liu's latest education in University of Science and Technology of China